X-RAY CHARACTERIZATION OF TEXTURE IN THIN FILMS USING A TWO DIMENSIONAL POSITION SENSITIVE DETECTOR P. D. Moran, Siemens Energy and Automation, Inc., Analytical Instrumentation, 6300 Enterprise Lane, Madison WI. 53719-1173, USA

By employing a low-noise, two-dimensional position sensitive x-ray detector it is possible to record pole figures in less than an hour from films that are as thin as 200 Angstroms. As well, "Area Detector" techniques allow one to accurately characterize sharply textured films, such as those seen in thin film optoelectronic and superconducting materials, with a resolution not practical with conventional point-detector based texture instruments. Third, by simultaneously collecting data from the substrate, one can also investigate the relationship of texture in the film to the crystallography of the substrate on which it was grown. The ability to accomplish these three tasks is primarily due to the ability of an area detector to simultaneously measure data from a large amount of reciprocal space at the same time. Of course, the measurements discussed above require different data collection and analysis strategies. The dependence of the strategy on the degree of texture present is discussed through practical examples of texture measurements from broadly and sharply textured thin films. Finally, the strategies employed using Area Detector techniques are examined through a comparison with the strategies that would be employed using a conventional point detector-based texture instrument to accomplish the same goals.