ADVANTAGES OF X-RAY REFLECTOMETRY EXPERIMENTS USING GBEL MIRRORS. P.J. LaPuma, Siemens Analytical Instruments, Madison, WI

X-ray reflectometry is a very useful tool for characterizing thin films deposited on substrates. It provides highly accurate and nondestructive characterization of thin films and layer packages in the thickness range between 1 and 300nm. However, the sample properties determine the amount of information that can be obtained from the sample. High surface roughness and coatings with large electron densities will cause relevant information to become obscured soon after the total reflection plateau due to absorption and diffuse scatter. The only way to obtain information from these types of samples was to increase the measurement time in order to obtain better counting statistics, or make the measurement at a synchrotron light source. With Gbel Mirrors these measurements are now possible in the laboratory. Gbel Mirrors provide a higher flux and a parallel beam that is ideal for these measurements. Bragg peaks from repeating multilayers as well as oscillations from rough samples can now be seen at high angles.