X-RAY METHODS TO THE CHARACTERIZATION OF THIN COATINGS. S. Betsofen^* and L. Petrov^**. ^*Baikov Inst. of Metallurgy, Russian Academy of Sciences, 49 Leninskiy pr. Moscow 117334 Russia; ^**National Inst. of Aircraft Technology

The features of characterization methods such as texture, residual macrostress, microhardness and X-ray fluorescence thickness measurement are considered. The X-ray fluorescence method is considered in comparison to the other methods. The sensitivity, accuracy and the limits of thickness measurement are cosidered for the various combinations of the coating and the substrate. The predominant orientations of Ti monolayer coatings are observed: {1010} , {1120} and {1011} in depend of deposition condition. The different orientations of TiN monolayers are observed in the range from {110} for low of both the nitrogen pressure and arc current to {111} for higher of its. The semicoherent Ti-TiN interface is obtained in the case multilayer coatings. In this case the orientation of layers are {111} for TiN and {0001} for Ti. The orientations of {1010} and {1120} for Ti and {111} for TiN are obtained in the case of diffuse interface. The features of macrostresses measurement concern with thin high textured coatings are considered. The contribution of both the texture and elastic anisotropy to macrostress measurement are calculated in terms of elastic anisotropy theory. The X-ray reflection for which elastic anisotropy lead to linear or nonlinear dependences of X-ray strain vs. sin²[[Psi]] are obtained. The effects which are associated with nonuniform distribution of macrostrain in a graines having a different orientation are considered. The macrostress phenomenon concern with mismatch of thermal extension coefficient (TEC) of coating and substrate, deposition parameters and layer sequence in the multilayer coatings are discussed. The texture of alternating layers like Ti, TiB₂, Al₂O₃, AlN and SiC, which have the TEC anisotropy ([[alpha]]_c != [[alpha]]_a), can be used for governing of macrostresses by the formation of specific textured layers.