Distribution of thicknesses obtained in different laboratories.

Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment

J. Appl. Cryst. (2008). 41, 143-152 [doi:10.1107/S0021889807051904]

X-ray reflectometry (XRR) is a well-established technique to quantitatively evaluate electron density profiles, thickness, and roughness of thin layers. In this paper, results of the first world-wide XRR round-robin experiment, involving a number of prominent laboratories, are presented and discussed. The reproducibility of measurements obtained using different equipment has been assessed. The influence of fitting of the experimental data on the thickness determination was shown to be non-negligible compared with experimental factors.