X-RAY ANGULAR SCANNER AND ITS APPLICATION TO X-RAY IMAGING. V.V. Protopopov, The Physical and Technical Inst., Russian Academy of Sciences, 117218, Moscow, Krasikova St., 25a Fax: (095) 129-3141

On the basis of multilayer mirror with angular region of 0.5( at CuK₍ radiation the programmable scanner is developed. The azimuthal-elevation mirror mounting with the polar axis along incident beam enables to scan in a cone of 1((1( width. During the azimuthal motion of the mirror the grazing angle of the incident beam lies in the region 0.5(-1.1( and is a constant value. At this condition the average reflection efficiency of the mirror is about 30%. Two stepping motors with gears provide the accuracy of beam positioning of 1 arc.sec along elevation coordinate and 1 arc.min along azimuth coordinate. The software allows both random access to a given point and arbitrary law scanning. As a demonstration of the scanner capabilities the prototype of X-ray raster scanning microscope was developed and tested. The spatial resolution in this experiment was limited by the divergence of a narrow X-ray beam and was measured to be about 20 (m in object plane. No focusing elements were applied. The images are formed by computer processing of the detector signal registered in each image pixel. At the figure is shown the image of a copper grid with a mesh of 110(m. The contrast of opened parts of the 50(m wires is less then the contrast of the knots because of the partial transparency of the wires. Total number of image elements is 80(80, four contrast levels.