CORRELATED ROUGHNESS INFORMATION FROM DIFFUSE X-RAY SCATTERING OF STEPPED SURFACES. P. M. Reimer, Y. Yamaguchi, J.H. Li, H. Hashizume, Tokyo Institute of Technology

We discuss the problem of extracting useful information on interfacial roughness correlations from glancing angle diffuse scattering data. In recent years, the distorted wave Born approximation (DWBA) has been successfully applied to model diffuse scattering from fractally rough surfaces. However, many surfaces/interfaces of interest are often stepped due to small substrate miscut angles, and the fractal approach does not take into account such strong, periodic, correlated interface structures. We discuss how to extract information on roughness parameters and roughness correlations from the diffuse intensity under such circumstances, using Si/SiGe heterostructures and calcite surfaces as examples. (Applications will be found in related presentations by J.H. Li and Y. Yamaguchi).