EVOLUTION OF STRESS DISTRIBUTIONS AND MORPHOLOGY OF CVD DIAMOND FILMS. J. W Steeds, N. C. Burton, A. R. Lang, D. Pickard, and Yu Shreter, University of Bristol, Bristol U.K. and J. E. Butler, Naval Research Laboratory, Washington DC, USA

Three dimensional stress distributions have been determined in CVD diamond films by monochromatic cathodoluminescence imaging and confocal micro Raman spectroscopy. Particular emission lines were chosen in cathodoluminescence that were split by stress into components that were then selected for monochromatic imaging. Depth resolved information was obtained by changing the electron accelerating voltage in a scanning electron microscope. The data thus obtained has been analysed to give the stress tensor at the centre of square facets. Confocal Raman microscopy was performed at different focal depths to obtain independent three dimensional information about the stress distribution. The results were related to the growth processes involved by plan view transmission electron microscopy at different depths in the diamond films and by interference optical microscopy of the growth surfaces. Misorientations were explored by back scattered electron diffraction. Finite element modelling of the experimental situation is now in progress.