X-RAY MULTILAYER MIRRORS WITH WIDE ANGULAR RANGE. V.A.Kalnov, V.V.Protopopov, K.A.Valiev, R.M.Imamov* .The Physical and Technical Inst., Russian Academy of Sciences 117218, Moscow, Krasikova St., 25a, *The Institute of Crystallography, Russian Academy of Sciences 117333, Moscow, Leninskii pr.,79

The multilayer mirrors with 0.4deg.-0.5deg. reflection region and reflectivity of 40-30% at CuK_[[alpha]] radiation are developed for various applications, including focusing and scanning of X-ray beams. This is accomplished by forming a structure with continuously decreasing period from the substrate to the surface. Several pairs of materials were tested: W-C, W-Al, Cu-C. Adequate mathematical simulation was developed, taking into account the divergence of the beam, the roughness and real optical constants of the layers, that enabled to determine optimal structure parameters. The multilayer coating was formed with magnetron sputtering installation, calibrated thoroughly according to special procedure, providing the accuracy within 1-2Å of layers thickness. As a result a good agreement was achieved between experimental and theoretical results (fig. 1). The substrate and interfaces roughness were investigated with AFM and HREM methods (fig.2).